Rule | Value | Description
|
METALINT.1 | 70 nm | Minimum width of intermediate metal
|
METALINT.2 | 70 nm | Minimum spacing of intermediate metal
|
METALINT.3 | 35 nm | Minimum enclosure around via1 on two opposite sides
|
METALINT.4 | 35 nm | Minimum enclosure around via[2-3] on two opposite sides
|
METALINT.5 | 90 nm | Minimum spacing of metal wider than 90 nm and longer than 900 nm
|
METALINT.6 | 270 nm | Minimum spacing of metal wider than 270 nm and longer than 300 nm
|
METALINT.7 | 500 nm | Minimum spacing of metal wider than 500 nm and longer than 1.8um
|
METALINT.8 | 900 nm | Minimum spacing of metal wider than 900 nm and longer than 2.7 um
|
METALINT.9 | 1500 nm | Minimum spacing of metal wider than 1500 nm and longer than 4.0 um
|