Rule | Value | Description
|
METAL1.1 | 65 nm | Minimum width of metal1
|
METAL1.2 | 65 nm | Minimum spacing of metal1
|
METAL1.3 | 35 nm | Minimum enclosure around contact on two opposite sides
|
METAL1.4 | 35 nm | Minimum enclosure around via1 on two opposite sides
|
METAL1.5 | 90 nm | Minimum spacing of metal wider than 90 nm and longer than 900 nm
|
METAL1.6 | 270 nm | Minimum spacing of metal wider than 270 nm and longer than 300 nm
|
METAL1.7 | 500 nm | Minimum spacing of metal wider than 500 nm and longer than 1.8um
|
METAL1.8 | 900 nm | Minimum spacing of metal wider than 900 nm and longer than 2.7 um
|
METAL1.9 | 1500 nm | Minimum spacing of metal wider than 1500 nm and longer than 4.0 um
|