Rule | Value | Description
|
IMPLANT.1 | 70 nm | Minimum spacing of nimplant/ pimplant to channel
|
IMPLANT.2 | 25 nm | Minimum spacing of nimplant/ pimplant to contact
|
IMPLANT.3/4 | 45 nm | Minimum width/ spacing of nimplant/ pimplant
|
IMPLANT.5 | none | Nimplant and pimplant must not overlap
|