Syllabus (Objectives, Content & Grading) 04:00 P.M. - 05:15
P.M.,M,W (09/07/2010 - 12/15/2010), KHKH
3-125, TCEASTBANK , 4 credits |
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Topic |
Selected Readings/Links |
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36: |
Week 1: Sep 8
L1 Wed |
Homework: - Read the lecture on nanotechnology by R.P. Feynmann, "There's Plenty of Room at the Bottom:" http://www.zyvex.com/nanotech/feynman.html - Work on the question sheet (see lecture 1 last pages) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets). |
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37: |
Week 2: Sep 13
L2/L3 |
1. Introduction (1 lecture) -History, R.P Feynmann,
State of Art, policies, implications for students
2. NanoScale Imaging (3 lectures) |
Homework: -
Read
Nanotechnology Research Directions, IWGN Workshop Report, eds.
M.C. Roco, R.S. Williams and P. Alivisatos, Kluwer Academic Publishers (2000)
- Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
Homework: - Study http://www.matter.org.uk/tem/sitemap.htm interactive learning tools that relate to engineering, physics, and material science of SEMs and TEMs. - Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets). |
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38: |
Week 3: Sep 20
L4/L5 |
-Scanning tunneling
microscopy ~Theory: concept of
tunneling, particle in a box, Schrödinger equation, electron density of
states ~Theory: Forces on a
nanoscale, force sensitivity, instrument design aspects Lab Experiment: Nanoscale imaging- Scanning Probe and
Optical Microscopy |
Homework: - Study http://hyperphysics.phy-astr.gsu.edu/hbase/quantum/schrcn.html#c1 interactive learning tools on barrier penetration, particle in a box and Schroedinger Equation. - Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
Homework: - Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets). |
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39: |
Week 4: Sep 27
L6/L7 |
3. Traditional Nanotechnology (2 lectures)
Lab Experiment: Evaporation and Lift-off experiment |
Homework: -
Read the
challenge section in Lithography of the INTERNATIONAL TECHNOLOGY ROADMAPFOR
SEMICONDUCTORS 2005 EDITION LITHOGRAPHY Litho2005.pdf ~
What is the
expected half pitch limit for projection lithography with 193nm wavelength
light? ~
How
is the industry pushing the numerical aperture NA to get to this resolution
using a 193 nm light? ~
What
is the expected half pitch when extreme ultra violet lithography will be
used? ~
Work on the
question sheets (see last lecture) and turn in your answers beginning of
Monday’s class by filling in the answers on the sheets. |
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40: |
Week 5: Oct 4
L8/L9 |
4. Unconventional Nanotechnology & Nanopatterning (3 lectures)
~Theory: Estimate Collapse Surface Free Energy Lab Experiment: Nanoimprinting & PDMS stamp casting
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Homework: - Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
Homework: - Read the art of building small by Whitesides http://www.ece.umn.edu/users/hjacobs/EE5181/handouts/theartofbuildingsmall.pdf ~ What is a primary reason why soft lithographic tools are being used? ~
How do you
fabricate a mold? < Three sentences ~
How is a PDMS
stamp made? < Three sentences ~ Describe key steps to print self-assembled monolayers (SAM) using PDMS stamps? ~ How do you check if you succeeded in printing the SAM? ~ You have made an e-beam pattern in PMMA and would like to make a replica of it without going back to the e-beam writer. Read the chapter on solvent assisted micromolding and describe the required steps. The end product you want to get is a new PMMA coated silicon chip that carries the same pattern as your original. |
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41: |
Week 6: Oct 11
L10 |
-Continue Nanoimprint, Soft
Lithography using elastomers – printing, stamping, molding (Jacobs) |
Homework: -
Read Printing Meets Lithography:
Soft Approaches to High-Resolution Patterning - Work on the question sheet (see last lecture) and prepare for the Midterm. |
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Midterm (Oct. 13) |
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42:
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Week 7: Oct 18
L11/L12 |
5. Nanomaterials: Properties,
Synthesis, and Applications (11 lectures) -Optical Properties –
Surface Plasmons |
Homework: - Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets). |
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43: |
Week 8: Oct 25
L13 |
-Guest Lecture: Professor Sang-Hyun Oh “Nano-plasmonics Applications" -OptoElectronic Properties
in Metals, Insulators, & Semiconductors |
Homework: - Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets). |
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44: |
Week 9: Nov 1 L15
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Homework: -
(Very
important) -- Read Chapter 2 |
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Group Presentations (Topics 1-5): Each group of at most 2 students reviews a selected area and proposes a new research activity in a 20 minute talk and two page report that will be graded |
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45:
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Week 10: Nov 8 L17 |
Homework: -
Learn the
basics about nanowire synthesis and applications and read Chapter 4 Homework: - Prepare for the Lab experiment where you synthesize Au nanoparticles to make a chemical sensor.
Homework: -
Work on the
question sheet (see last lecture) and turn in your answers beginning of
Monday’s class (print and add your answers to the questions sheets). |
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46:
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Week 11: Nov 15 L20/L21 |
-Integration of
Nanoparticles using Directed Self-assembly (Jacobs) |
Homework: - Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets). |
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47:
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Week 12: Nov 22 |
6. Nanomanufacturing: Heterogeneous
Integration and Assembly (~3 lectures) -Self-assembly across
lengths scales and material boundaries (Jacobs) -Nanotransfer across lengths
scales and material boundaries (Jacobs) |
Homework: - Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets). |
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48:
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Week 13: Nov 29 L22/23
Jacobs at MRS |
Lab Experiment: Scanning Electron Microscope/ Charfac |
Homework: - Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets).
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49:
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Week 14: Dec 6 |
Group Presentations (Topics 6-8): Each
group of at most 2 students reviews a selected area and proposes a new
research activity in a 20 minute talk and two page report that will be graded |
Homework: - Work on the question sheet (see last lecture) and turn in your answers beginning of Monday’s class (print and add your answers to the questions sheets). |
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Group Presentations (Topics 6-8): Each group of at most 2 students reviews a selected area and proposes a new research activity in a 20 minute talk and two page report that will be graded |
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50:
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Week 15: Dec 13 |
Comprehensive final exam: Wednesday December 15th |
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EE 5181 - Introduction to Nanotechnology Syllabus |
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4.0
cr; Prereq-[3161, 3601, IT grad student]; fall, every year Instructor: Prof. H. O. Jacobs, hjacobs@umn.edu |
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Class size: The class size is limited to 25 students due to the LAB experiments that complement the lectures.
Class Location: The class meets Mondays and Wednesdays 4:00-5:15 pm in Keller Hall Room 3-125.
Objectives:
- The objective of this course is to introduce some of the fundamentals and current state-of-the-art in Nanotechnology through lectures from the instructor, selected readings, experiments, and special topic presentations from the students. The topics that will be covered include: Conventional and Advance Lithography, Scanning Probes, Nanomaterials Properties, Nanomaterial Synthesis, Nanomaterial Electronics, Bottom-up/Top-Down Nanomaterial Integration and Assembly.
- While this course provides an overview of a broad range of topics it will discuss theoretical aspects tailored to benefit EE and ME students that may have limited knowledge in material science/chemistry.
- The students are provided cross-disciplinary scientific knowledge and professional skills that are key to strive in high-tech companies, emerging science based industries, government laboratories, and academia.
Course content:
1. Introduction - History, R. P. Feynmann (~2 lectures)
- Logistics, R. P. Feynmann, There’s plenty of room at the bottom and others (Famous Talk)
- History, Definitions, Economics, Implications for Students, Nanotech Policies.
2. NanoScale Imaging (SEM, STM, AFM) (3 lectures)
- Electron microscopy
- Scanning tunneling microscopy
- Atomic force microscopy
SEM Theory: De Broglie wavelength, Auger emission, X-Ray emission, EDS spectra.
STM Engineering: concept of feedback
STM Theory: concept of tunneling, particle in a box, Schrödinger equation, electron density of states.
AFM Theory: Forces on a nanoscale, force sensitivity, instrument design aspects.
Lab Experiment: Force Distance Curves
3. Traditional Nanotechnology (~2 lectures)
- Top Down Lithography, Interference Lithography, Ebeam Lithography, STR Needs & Next Generation Advanced Lithography
Theory: Photon/Electron lith. resolution limit
Experiment: Nanoscale imaging: Scanning Probe and Optical Microscopy
- Material Deposition/Growth Techniques (spin coating, drop coating, evaporation, supersaturation, condensation, CVD, PVD, MBE Crystal Growth, Knudsen Cell, Introduction to Nanomaterials, concept of glow discharge/ plasma)
Theory: partial pressure/ volume particle concentration
Theory: Basic gas kinetics -- impingement rate, volume density & mean free path as a function of pressure
Theory: Equilibrium vapor
pressure & evaporation rate
Experiment: Metal evaporation and liftoff
4. Unconventional Nanotechnology & Nanopatterning (~2 lectures)
- Scanning Probe Lithography
Knowledge: Basic Functions, Oxidation, Charge and Surface Potential, Double Layers and more
- Nanoimprint, Soft Lithography using Elastomers – printing, stamping, molding
Theory: Estimate Collapse due to Surface Free Energy
Experiment: MicroContact Printing of Self-Assembled Monolayers
5. Nanomaterials: Properties, Synthesis, and Applications (~11 lectures)
- Nanomaterial Properties (Melting Point, Surface Area, Surface Free Energy, Gibbs Energy, Mechanical Properties, Ultra-Hard)
- Optical Properties – Surface Plasmons and Quantum Size Effects
Theory: Lorentz Oscillator Model,
Particle in a Box.
- Nanophotonics
Applications, Guest Lecture
- Electronic Properties in Metals & Semiconductors - Surface scattering, Ballistic Conduction
Theory: Mean free paths/crystal size (Fermi Speed)
- Organic Electronics and Transport in Organic thin film devices and Applications Guest Lecture
- Nanomaterial Synthesis
Routes (
- Synthesis of
Nanoparticles (
- Gas Phase Synthesis of Nanoparticles, Guest Lecture
- Nanoparticle electronics,
- Synthesis of Nanowires
(
- Nanowire Synthesis and Nanowire Application
Metallic and semiconducting nanotubes FET transistors and their demonstrated performance, potential applications of nanotubes in IC intereconnects, circuits, LEDs and field emission displays. Nanowires and single electron transistors, crossbar switches and applications to computing, Sensors, Field emission, Thermoelectric devices.
6. Nanosystems manufacturing: Heterogeneous Integration and Self-Assembly (~3 lectures)
- Introduction and Motivation (Jacobs)
- Overview of the forces
and interactions at the different scales (Jacobs, Israelachvili.
- Combining Top-Down Patterning with Bottom-Up Self-Assembly (Jacobs).
- Nanotransfer across lengths scales and material boundaries (Jacobs)
- Self-assembly across lengths scales and material boundaries (Jacobs)
Grading:
- 10 points for class
participation and homework. You
can get 10 points in 2.5 point increments. The grading key is as follows
10p outstanding throughout the semester, 7.5 p very good, 5 p average, 2.5
p little, 0 p no participation.
- 30 points for a
special topic student presentation and report on a selected topic. You will prepare a special topic student
presentation (20 points) and report describing a new/original idea that
you develop (10 points). Details: Students form a group (group size <=
2) during the first lecture and sign up for a topic of choice. They review
the selected area and propose a new research activity in a 20 minute long
talk. Together with the talk you provide a 2 page long report to pitch the
idea. Originality, ability to present the idea, and ability to provide
scientific sound answers to questions are learning goals. The topics are
as follows: (1)
NanoScale Imaging, (2) Conventional Nanoscale Lithography/Patterning, (3)
Unconventional Nanoscale Lithography/Patterning, (4) Novel Nanomaterials
Sythesis, (5) Nanomaterials Application, (6) Nanoelectronics, (7)
Nanosystems and Heterogeneous Integration, (8) own topic in the field of
Nanotechnology.
- 20 points Midterm (closed notes and books, one hand-written,
single side, 8.5x11 crib sheet is allowed).
- 40 points Comprehensive Final Exam (closed notes and books, one hand-written,
single side, 8.5x11 crib sheet is allowed).
- Exam
Absences: No
written make-up exams will be given. Missing the final is
permitted only for the most compelling reasons. Except in extraordinary
situations, you should obtain permission from the professor to miss
an exam in advance; otherwise you will be awarded a 0. A missed
final with a valid excuse (i.e. note from a doctor, police officer,
or judge) will be replaced by a prorated share of the other grades you
have received and in some case by an oral exam. My recommendation is not
to miss an exam.
Academic dishonesty: Please refer to the Student Judicial Affairs web pages http://www.sja.umn.edu/
General interest texts:
G. Cao, Nanostructures & Nanomaterials: Synthesis,
Properties & Applications
G. Ozin, A Arsenault, Nanochemistry: A Chemical
Approach to Nanomaterials
A. Steckl, AParticle beam fabrication and in-situ
processing of Integrated Circuits,@ Proc. IEEE (1986)
Scientific American, Understanding Nanotechnology
Ed Regis, Nano: The Emerging Science of Nanotechnology
Timp, ed., Nanotechnology
C. Marrian, Editor, Special Issue Nanometer-Scale
S&T, Proc. IEEE. (April 1997)
A. T. Hubbard, ed, The Handbook of Surface Imaging and
Visualization. CRC press (1995)
Our Molecular Future: How Nanotechnology, Robotics, Genetics and Artificial
Intelligence Will Transform the World, Prometheus (2002), ISBN 1573929921