Circuit Pictures

  2005 NSF Research Experience for Teachers (RET) Program

Home 
Equipment 
Pictures 
Resources 

img8.jpg

This is a portion of an integrated circuit at 2000x as seen through the SEM. Notice that the bar scale below the image is 10 microns.

 

img7.jpg

This is a different location on the same circuit, now at a magnification of 5000x.  Note the defect has a size of about 2 microns.

 

img6.jpg

This is a hole (with a radius of about 1 micron) in the same circuit, this time at a magnification of 20000x.