U of M MEMS-Program

The University of Minnesota Center for Micro Electro Mechanical Systems (MEMS) was formed in 1992 through NSF funding to provide multi-disciplinary education and research infrastructure development in MEMS.

The Center supports several instructional courses and a variety of research projects based on MEMS technologies. One of the MEMS emphasis areas at the University of Minnesota is the use of piezoelectric materials for sensors and actuators. A modern 10,000 sq. ft. microelectronics laboratory (the Microtechnology Laboratory, MTL) supports the integration of piezoelectric thin films, micromechanical structures, and MOS integrated circuits. 

Comments on this page should be sent to Professor William Robbins robbins@ece.umn.edu